Characterization of CO 2 microwave plasma based on the phenomenon of skin-depth-limited contraction

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Authors: A J Wolf, T W H Righart, F J J Peeters, P W C Groen, M C M van de Sanden, W A Bongers

Journal title: Plasma Sources Science and Technology

Journal number: 28/11

Journal publisher: IOP Publishing Ltd

Published year: 2019

Published pages: 115022

DOI identifier: 10.1088/1361-6595/ab4e61

ISSN: 1361-6595