Resolving discharge parameters from atomic oxygen emission

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Authors: P Viegas, L Vialetto, A W van de Steeg, A J Wolf, W A Bongers, G J van Rooij, M C M van de Sanden, P Diomede, F J J Peeters

Journal title: Plasma Sources Science and Technology

Journal number: 30/6

Journal publisher: Institute of Physics Publishing

Published year: 2021

Published pages: 065022

DOI identifier: 10.1088/1361-6595/ac04bd

ISSN: 0963-0252