Dry etch damage in n-type crystalline silicon wafers assessed by deep-level transient spectroscopy and minority carrier lifetime

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Eddy Simoen, Hariharsudan Sivaramakrishnan Radhakrishnan, Md. Gius Uddin, Ivan Gordon, Jef Poortmans, Chong Wang, Wei Li

Journal title: Journal of Vacuum Science & Technology B

Journal number: 36/4

Journal publisher: AVS Science and Technology Society

Published year: 2018

Published pages: 041201

DOI identifier: 10.1116/1.5026529

ISSN: 2166-2754