Profilometry of thin films on rough substrates by Raman spectroscopy

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Authors: Martin Ledinský, Bertrand Paviet-Salomon, Aliaksei Vetushka, Jonas Geissbühler, Andrea Tomasi, Matthieu Despeisse, Stefaan De Wolf , Christophe Ballif , Antonín Fejfar

Journal title: Scientific Reports

Journal number: 6/1

Journal publisher: Nature Publishing Group

Published year: 2016

DOI identifier: 10.1038/srep37859

ISSN: 2045-2322