Laser Assisted Patterning of a-Si:H: Detailed Investigation of Laser Damage

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Authors: Menglei Xu, Twan Bearda, Hariharsudan S. Radhakrishnan, Miha Filipič, Ivan Gordon, Maarten Debucquoy, Jozef Szlufcik, Jef Poortmans

Journal title: physica status solidi (RRL) - Rapid Research Letters

Journal number: 11/9

Journal publisher: Wiley - VCH Verlag GmbH & CO. KGaA

Published year: 2017

Published pages: 1700125

DOI identifier: 10.1002/pssr.201700125

ISSN: 1862-6254