Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

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Authors: Stella Gries, Manuel Brinker, Berit Zeller-Plumhoff, Dagmar Rings, Tobias Krekeler, Elena Longo, Imke Greving, Patrick Huber

Journal title: Small

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2023

Published pages: 2206842

DOI identifier: 10.1002/smll.202206842

ISSN: 1613-6810