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Authors: Marek Mezera; Camilo Florian; Gert-willem Römer; Jörg Krüger; Jörn Bonse
Journal title: Ultrafast Laser Nanostructuring. Springer Series in Optical Sciences
Journal number: 239
Journal publisher: Springer
Published year: 2023
Published pages: 827–886
DOI identifier: 10.1007/978-3-031-14752-4_23
ISBN: 978-3-031-14751-7