Patterning and control of the nanostructure in plasma thin films with acoustic waves:mechanical vs. electrical polarization effects

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Authors: Aurelio García-Valenzuela, Armaghan Fakhfouri, Manuel Oliva-Ramirez, Victor Rico-Gavira, Teresa Cristina Rojas, Rafael Alvarez, Siegfried B. Menzel, Alberto Palmero, Andreas Winkler and Agustín R. González-Elipe

Journal title: Materials Horizon

Journal number: 8

Journal publisher: Royal Society of Chemistry

Published year: 2021

Published pages: 515

DOI identifier: 10.1039/d0mh01540g

ISSN: 2051-6347