Coarse-grained approach to amorphous and anisotropic materials in kinetic Monte Carlo thin-film growth simulations: A case study of TiO2 and ZnO by plasma-enhanced chemical vapor deposition

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Authors: Budagosky, Jorge; García-Casas, Xabier; Sánchez-Valencia, Juan R.; Barranco, Ángel; Borrás, Ana

Journal title: Plasma Processes and Polymers

Journal number: 19

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2022

Published pages: e2100179

DOI identifier: 10.1002/ppap.202100179

ISSN: 1612-8850