Periodic Reporting for period 1 - INTELEG S HF (Feasibility Study for INTELEG® S HF – a Wide Pressure Range Process Gas Analysis System)

Nova Fabrica, a Lithuanian SME, has devised an innovative Gas Analysis System (GAS) which solves the issues faced by the fast-growing thin and ultra-thin film production industry. Modern vacuum-based production processes exhibit slow or fast process gas composition changes and...