Integrated optical-readout of a high-Q mechanical out-of-plane mode

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Authors: Jingkun Guo & Simon Gröblacher

Journal title: Light Science & Applications

Journal number: 11

Journal publisher: Springer Nature

Published year: 2022

Published pages: 282

DOI identifier: 10.1038/s41377-022-00966-7

ISSN: 2047-7538