Mechanism of Electron-Beam Manipulation of Single-Dopant Atoms in Silicon.

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Authors: Alexander Markevich; Bethany M. Hudak; Jacob Madsen; Jiaming Song; Paul C. Snijders; Andrew R. Lupini; Toma Susi

Journal title: Journal of Physical Chemistry C

Journal number: 125 / 29

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 16041–16048

DOI identifier: 10.1021/acs.jpcc.1c03549

ISSN: 1932-7447