Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

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Authors: Henock Demessie Yallew; Jana Jágerská; Martin M. Greve

Journal title: J. Vac. Sci. Technol. B

Journal number: 41

Journal publisher: AVS Science and Technology Society

Published year: 2023

DOI identifier: 10.1116/6.0002187

ISSN: 2166-2754