High laser induced damage threshold photoresists for nano-imprint and 3D multi-photon lithography

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Authors: Elmina Kabouraki, Vasileia Melissinaki, Amit Yadav, Andrius Melninkaitis, Konstantina Tourlouki, Theodoros Tachtsidis, Nikolaos Kehagias, Georgios D. Barmparis, Dimitris G. Papazoglou, Edik Rafailov, Maria Farsari

Journal title: Nanophotonics

Journal number: 0/0

Journal publisher: De Gruyter

Published year: 2021

Published pages: 1-10

DOI identifier: 10.1515/nanoph-2021-0263

ISSN: 2192-8614