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Authors: Raziyeh Bounik, Massimiliano Gusmaroli, Patrick M. Misun, Vijay Viswam, Andreas Hierlemann, Mario M. Modena
Journal title: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Journal publisher: IEEE
Published year: 2019
Published pages: 441-444
DOI identifier: 10.1109/memsys.2019.8870732
ISBN: 978-1-7281-1610-5