Summary
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Authors: Seán Kelly, Alex van de Steeg, Ashley Hughes, Gerard van Rooij, Annemie Bogaerts
Journal title: Plasma Sources Science and Technology
Journal number: 30/5
Journal publisher: Institute of Physics Publishing
Published year: 2021
Published pages: 055005
DOI identifier: 10.1088/1361-6595/abf1d6
ISSN: 0963-0252
