High Frequency MEMS Capacitive Mirror for Space Applications

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Authors: Bagolini, A.; Sitar, A.; Porcelli, L.; Boscardin, M.; Dell’Agnello, S.; Delle Monache, G.

Journal title: Micromachines

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2023

DOI identifier: 10.3390/mi14010158

ISSN: 2072-666X