Interplay between Strain and Defects at the Interfaces of Ultra-Thin Hf05Zr0.5O2-Based Ferroelectric Capacitors

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Authors: Greta Segantini, Benooit Manchon, Infante Ingrid C., Matthieu Bugnet, Rabei Barhoumi, Shruti Nirantar, Edwin Mayes, Pedro Rojo Romeo, Nicholas Blanchard, Damien Deleruyelle, Sharath Sriram, and Bertrand Vilquin

Journal title: Advanced Electronic Materials

Journal number: 9

Journal publisher: Wiley-VCH GmbH

Published year: 2023

Published pages: 2300171

DOI identifier: 10.1002/aelm.202300171

ISSN: 2199-160X