Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertionof a Ti Interfacial Layer

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Authors: Greta Segantini, Rabei Barhoumi, Benoit Manchon, Ingrid Canero Infante, Pedro Rojo Romeo, Matthieu Bugnet, Nicolas Baboux, Shruti Nirantar, Damien Deleruyelle, Sharath Sriram, and Bertrand Vilquin

Journal title: physica status solidi (RRL) - Rapid Research Letters

Journal number: 16

Journal publisher: Wiley-VCH GmbH

Published year: 2022

Published pages: 210058

DOI identifier: 10.1002/pssr.202100583

ISSN: 1862-6270