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Authors: Annemie Bogaerts, Weizong Wang, Antonin Berthelot, Vasco Guerra
Journal title: Plasma Sources Science and Technology
Journal number: 25/5
Journal publisher: Institute of Physics
Published year: 2016
Published pages: 055016
DOI identifier: 10.1088/0963-0252/25/5/055016
ISSN: 1361-6595