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Authors: Weizong Wang, Antonin Berthelot, Stanimir Kolev, Xin Tu, Annemie Bogaerts
Journal title: Plasma Sources Science and Technology
Journal number: 25/6
Journal publisher: Institute of Physics
Published year: 2016
Published pages: 065012
DOI identifier: 10.1088/0963-0252/25/6/065012
ISSN: 1361-6595