Comparison of InGaAs and InAlAs sacrificial layers for release of InP-based devices

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Authors: J. O’Callaghan, R. Loi, E. E. Mura, B. Roycroft, A. J. Trindade, K. Thomas, A. Gocalinska, E. Pelucchi, J. Zhang, G. Roelkens, C. A. Bower, B. Corbett

Journal title: Optical Materials Express

Journal number: 7/12

Journal publisher: Optical Society of America

Published year: 2017

Published pages: 4408

DOI identifier: 10.1364/ome.7.004408

ISSN: 2159-3930