Application of a Gas-Injection System during the FIB-TOF-SIMS Analysis—Influence of Water Vapor and Fluorine Gas on Secondary Ion Signals and Sputtering Rates

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Authors: Agnieszka Priebe, Ivo Utke, Laszlo Pethö, Johann Michler

Journal title: Analytical Chemistry

Journal number: 91/18

Journal publisher: American Chemical Society

Published year: 2019

Published pages: 11712-11722

DOI identifier: 10.1021/acs.analchem.9b02287

ISSN: 0003-2700