Stationary beam full-field transmission helium ion microscopy using sub-50 keV He + : Projected images and intensity patterns

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Authors: Michael Mousley, Santhana Eswara, Olivier De Castro, Olivier Bouton, Nico Klingner, Christoph T Koch, Gregor Hlawacek, Tom Wirtz

Journal title: Beilstein Journal of Nanotechnology

Journal number: 10

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2019

Published pages: 1648-1657

DOI identifier: 10.3762/bjnano.10.160

ISSN: 2190-4286