Highest resolution chemical imaging based on Secondary Ion Mass Spectrometry performed on the Helium Ion Microscope

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Authors: Jean-Nicolas Audinot, Patrick Philipp, Olivier De Castro, Antje Biesemeier, Hung Quang Hoang, Tom Wirtz

Journal title: Reports on Progress in Physics

Journal publisher: Institute of Physics Publishing

Published year: 2021

DOI identifier: 10.1088/1361-6633/ac1e32

ISSN: 0034-4885