Magnetic Sector SIMS System with Continuous Focal Plane Detector for Advanced Analytical Capabilities on FIB Instruments

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Authors: Tom Wirtz, Olivier De Castro, Antje Biesemeier, Hung Quang Hoang, Jean-Nicolas Audinot

Journal title: Microscopy and Microanalysis

Journal number: 26/S2

Journal publisher: Cambridge University Press

Published year: 2020

Published pages: 1972-1974

DOI identifier: 10.1017/s1431927620019984

ISSN: 1431-9276