Imaging and Analytics on the Helium Ion Microscope

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Authors: Tom Wirtz, Olivier De Castro, Jean-Nicolas Audinot, Patrick Philipp

Journal title: Annual Review of Analytical Chemistry

Journal number: 12/1

Journal publisher: Annual Reviews, Inc.

Published year: 2019

Published pages: 523-543

DOI identifier: 10.1146/annurev-anchem-061318-115457

ISSN: 1936-1327