Microstructural and electrical properties of heat treated resistive Ti/Pt thin layers

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Authors: D. Resnik, J. Kovač, D. Vrtačnik, M. Godec, B. Pečar, M. Možek

Journal title: Thin Solid Films

Journal number: 639

Journal publisher: Elsevier Sequoia

Published year: 2017

Published pages: 64-72

DOI identifier: 10.1016/j.tsf.2017.08.028

ISSN: 0040-6090