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Resource
Nanolace-1110058
Helium Ion Beam Resist
Summary
Synthesis of Helium Ion Beam Resist
More information & hyperlinks
Web resources:
https://ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e5eed35a19&appId=PPGMS
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Associated projects
Nanolace - Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution
Organisations
Not specified