Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators

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Authors: Stefano Stassi, Ido Cooperstein, Mauro Tortello, Candido Fabrizio Pirri, Shlomo Magdassi, Carlo Ricciardi

Journal title: Nature Communications

Journal number: 12

Journal publisher: Nature Publishing Group

Published year: 2022

Published pages: 6080

DOI identifier: 10.1038/s41467-021-26353-1

ISSN: 2041-1723