Epitaxial Ge Virtual Substrates and Ge-on-Nothing on Si: Comparison of Material Properties

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Authors: Roger Loo, Clément Porret, Valérie Depauw, Han Han, Emma Vecchio, Mathias Berciano, Didit Yudistira, Marianna Pantouvaki, and Joris Van Campenhout

Journal title: Extended Abstracts Symposium on Electron Device Interface Technology

Journal publisher: EDIT

Published year: 2022

Published pages: 23-28

ISBN: 978-4-86348-790-1