Ge/Si Vertical Separate Absorption Charge Multiplication (VSACM) Avalanche Photo Diodes (APDs): Epitaxial Growth and Impact of Post-Epi Anneal on Excess Carrier Lifetime

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Authors: Loo, Roger, Porret, Clément, Han, Han, Berciano, Mathias, Yudistira, Didit, Ferraro, Filippo, Verheyen, Peter, Van Campenhout, Joris

Journal title: 3rd joint ICSI/ISTDM

Journal publisher: ICSI/ISTDM

Published year: 2024