Comparative Study of the Environmental Impact of Depositing Al2O3 by Atomic Layer Deposition and Spatial Atomic Layer Deposition

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Authors: Muhammad Farooq Khan Niazi, David Muñoz-Rojas, Damien Evrard, Matthieu Weber

Journal title: ACS Sustainable Chemistry and Engineering

Journal number: 11, 41

Journal publisher: American Chemical Society

Published year: 2023

DOI identifier: 10.1021/acssuschemeng.3c04135

ISSN: 2168-0485