Analytical and experimental study of stress effects in a MEMS ring gyroscope

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Authors: Mehran Hosseini-Pishrobat, Derin Erkan, Erdinc Tatar

Journal title: Sensors and Actuators A: Physical

Journal publisher: Pergamon Press Ltd.

Published year: 2023

DOI identifier: 10.1021/acsenergylett.3c02779

ISSN: 0346-251X