Diffractive microoptics in porous silicon oxide by grayscale lithography

Summary

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Authors: Leander Siegle, Dajie Xie, Corey A. Richards, Paul V. Braun, Harald Giessen

Journal title: Optics Express

Journal number: 32

Journal publisher: Optica Publishing Group

Published year: 2024

DOI identifier: 10.1364/OE.538142

ISSN: 1094-4087