Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy

Summary

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Authors: Mabel Ruiz-Lopez, Masoud Mehrjoo, Barbara Keitel, Elke Plönjes, Domenico Alj, Guillaume Dovillaire, Lu Li, Philippe Zeitoun

Journal title: Sensors

Journal number: 20

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2024

Published pages: 6426

DOI identifier: 10.3390/s20226426

ISSN: 1424-8220