High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams

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Authors: Mengqi Du, Xiaomeng Liu, Antonios Pelekanidis, Fengling Zhang, Lars Loetgering, Patrick Konold, Christina L. Porter, Peter Smorenburg, Kjeld S. E. Eikema, Stefan Witte

Journal title: Optica

Journal number: 10

Journal publisher: OSA

Published year: 2024

Published pages: 255

DOI identifier: 10.1364/optica.478346

ISSN: 2334-2536