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Authors: J. Kuzmk, M. Blaho, D. Greguov, P. Eli, O. Pohorelec, S. Hasenhrl, . Hak, F. Gucmann, Z. Zpran, E. Dobroka, M. Kyambaki, G. Konstantinidis
Journal title: Materials Science in Semiconductor Processing
Journal number: 185
Journal publisher: Elsevier BV
Published year: 2024
DOI identifier: 10.1016/j.mssp.2024.108959
ISSN: 1369-8001
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