A study of field emission current in MEMS capacitors with bottom electrode covered by dielectric film

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Authors: J. Theocharis, D. Birmpiliotis, S. Gardelis, G. Papaioannou

Journal title: Microelectronics Reliability

Journal number: 150

Journal publisher: Elsevier BV

Published year: 2023

DOI identifier: 10.1016/j.microrel.2023.115192

ISSN: 0026-2714