Three-Dimensional Nano-displacement Measurement by Four-Beam Laser Interferometry

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Authors: Xu Zhang, Zi Wang, Mengnan Liu, Zhengxun Song, Zuobin Wang, Litong Dong

Journal title: Nanomanufacturing and Metrology

Journal number: 7

Journal publisher: Springer Science and Business Media LLC

Published year: 2024

DOI identifier: 10.5281/ZENODO.15356653

ISSN: 2520-811X