Nano- and micro-crystalline diamond film structuring with electron beam lithography mask

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Authors: Quarshie M., Malykhin S., Obraztsov A. and Kuzhir P.

Journal title: Nanotechnology

Journal publisher: IOP

Published year: 2024

DOI identifier: 10.1088/1361-6528/ad18e9

ISSN: 1361-6528