An empirical study of nanocrystalline graphite’s morpho-structural and electrical properties as a function of substrate temperature during PECVD synthesis

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Authors: O. -G. Simionescu, O. Brîncoveanu, C. Pachiu, O. Ligor, A. Avram, M. Aldrigo

Journal title: 2023 International Semiconductor Conference (CAS)

Journal publisher: IEEE

Published year: 2023