Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles

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Authors: R Alvarez, A Garcia-Valenzuela, G Regodon, F J Ferrer, V Rico, J M Garcia-Martin, A R Gonzalez-Elipe, A Palmero

Journal title: Nanotechnology

Journal number: 35

Journal publisher: Institute of Physics Publishing

Published year: 2023

Published pages: 095705

DOI identifier: 10.1088/1361-6528/ad113d

ISSN: 0957-4484