In situ measurements of thermal and pressure dependent stress in SOG films by phase shifting interferometry

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Authors: T.M. van den Berg, A. Bosseboeuf, P. Coste, L. Vincent

Journal title: Micro and Nano Engineering

Journal number: 25

Journal publisher: Elsevier

Published year: 2024

Published pages: 100292

DOI identifier: 10.1016/j.mne.2024.100292

ISSN: 2590-0072