AI-Enhanced Digital Twin Architecture and local dispatching methods for yield improvement in a microelectronics facility

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Antonio Costa, Roberto Rosario Corsini, Marco Stefano Scroppo, Daniele Vinciguerra, Antonio Maria Stivala, Rosario Messina, Daniele Pagano, Andrea Matta, Mahsa Shekari UNICT, POLIMI, ST-I

Journal publisher: APMC Conference Hamburg

Published year: 2024