Advanced process control to estimate as accurately as possible the equipment parameters and endpoint trace to detect possible anomalies or drift on equipment process performance

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Authors: P.Petruzza (ST-I), M.Ravasio (ST-I), G.Fazio (ST-I), B.A.Motetti (POLITO), F.Daghero (POLITO), M.Poncino (POLITO), A.Burrello (POLITO)

Journal publisher: 23rd European Advanced Process Control and Manufacturing Conference (apc|m), Prague, Czech Republic

Published year: 2025