High Reflectivity, Compact, and Widely Tunable Distributed Bragg Reflector Based on Silicon-Rich SiNx-SiOy at 80 °C PECVD

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Authors: Irene Rodríguez Lamoso, Sascha Preu

Journal title: Applied Sciences

Journal number: 15

Journal publisher: MDPI

Published year: 2025

Published pages: 3330

DOI identifier: 10.3390/app15063330

ISSN: 2076-3417