Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies

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Authors: Chery, Emmanueal; Brady-Boyd, Anita; Lin, Yuyuan; Grimes, Michael; Springer, David; Slabbekoorn, John; Walsby, Edward; Croes, Kristof; Beyne, Eric

Journal title: Microelectron. Eng.

Journal number: 01679317

Journal publisher: Elsevier BV

Published year: 2022

DOI identifier: 10.1016/j.mee.2022.111896

ISSN: 0167-9317