The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Area-Selective Atomic Layer Deposition

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Brady-Boyd, Anita; O' Connor, Robert; Armini, Silvia; Selvaraju, Venkateswaran; Pasquali, Mattia; Hughes, Greg; Bogan, Justin

Journal title: Crossref

Journal number: 01694332

Journal publisher: Elsevier BV

Published year: 2022

DOI identifier: 10.1016/j.apsusc.2022.152679

ISSN: 0169-4332